Hyunwoong Ko
1 indexed paper
Recent (6 mo)
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126
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Comp. Eng.×1
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2026
Graph Attention-Based Virtual Metrology for Film Deposition Processes in Semiconductor Manufacturing
The paper proposes a graph attention-based virtual metrology framework that accurately predicts film thickness in semiconductor deposition by modeling structured, directional dependencies among heterogeneous process variables and temporal features.
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